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MEMS Hearing Aid

Micro-electro-mechanical systems (MEMS) Devices

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The graduate level course introduces fundamental concepts and tools needed for the design, simulation and analysis of microelectromechanical systems (MEMS). MEMS devices include at least electrical and mechanical components, and might interact with the mechanical, radiant, thermal, magnetic or chemical/biological signal domains. The course covers the mechanics of materials with focus on typical MEMS structures, such as cantilever beam and membranes, and the thermal transport in these structures. The theory of the most important transduction mechanisms, including piezoresistivity, piezoelectricity, electrostatics and thermoelectric effects is presented. In the final application oriented part of the course, many examples of mechanical, thermal, magnetic, and chemical/biological transducers and their packaging are discussed. Students apply the concepts/tools covered in this course in a group design project.

ME 6460 course taken at the Georgia Institute of Technology.


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Course Materials