YOGUELY

Micro-electro-mechanical systems (MEMS) Devices

By Aida Yoguely Cortés-Peña
2016

In this project I applied the fundamental concepts and tools needed for the design, simulation and analysis of microelectromechanical systems (MEMS). MEMS devices include at least electrical and mechanical components, and might interact with the mechanical, radiant, thermal, magnetic or chemical/biological signal domains. Other concepts applied include the mechanics of materials with focus on typical MEMS structures, such as cantilever beam and membranes, and the acoustic transport in these structures. The theory of the most important transduction mechanisms, including piezoelectricity, is used. The application of mechanical transducers and their packaging is discussed.

Piezoelectric MEMS Microphone